Andrei M. Shkel教授によるMEMSジャイロに関する特別セミナー
Special Seminar on MEMS gyroscopes by Prof. Andrei M. Shkel
- 2016年5月13日（金曜日） 13:00〜15:00
- マイクロ・ナノマシニング研究教育センター 3階 セミナー室
- 13 May 2016 (Friday) 13:00〜15:00
- Micro-Nanomachining Research & Education Center (MNC), 3rd floor, Seminar Room
After briefly reviewing the fundamentals of MEMS gyroscope, the state-of-the-art MEMS gyroscope technology is introduced. The performance of MEMS gyroscopes are continuously improving to reach the navigation grade, which has been conventionally achieved only by optical gyroscopes. Various types of precise MEMS gyroscopes and advanced control systems developed by Prof. Shkel's Laboratory are presented, including a quad mass gyroscope, a micro hemispherical resonator gyroscope (HRG), and origami-like 3D assembly of MEMS gyroscopes. In addition, this talk touches on novel atomic MEMS for ultra-precise timing reference and magnetic sensing. After this seminar, the attendee can understand that MEMS technology can further extend its sensing precision beyond the present level.